Zinc gallate (ZnGa2O4) epitaxial thin films: determination of optical properties and bandgap estimation using spectroscopic ellipsometry

Samiran Bairagi, Ching Lien Hsiao, Roger Magnusson, Jens Birch, Jinn P. Chu, Fu Gow Tarntair, Ray Hua Horng, Kenneth Järrendahl

研究成果: Article同行評審

10 引文 斯高帕斯(Scopus)

摘要

Electronic grade ZnGa2O4 epitaxial thin films were grown on c-plane sapphire substrates by metal-organic chemical vapor deposition and investigated using spectroscopic ellipsometry. Their thickness, roughness and optical properties were determined using a Multiple Sample Analysis based approach by the regression analysis of optical model and measured data. These samples were then compared to samples which had undergone ion etching, and it was observed that etching time up to four minutes had no discernible impact on its optical properties. Line shape analysis of resulting absorption coefficient dispersion revealed that ZnGa2O4exhibited both direct and indirect interband transitions. The modified Cody formalism was employed to determine their optical bandgaps. These values were found to be in good agreement with values obtained using other popular bandgap extrapolation procedures.

原文English
頁(從 - 到)3284-3295
頁數12
期刊Optical Materials Express
12
發行號8
DOIs
出版狀態Published - 1 8月 2022

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