Widely tunable micromachined optical filter with adjustable tuning characteristics

Chien-Chung Lin; J. Fu; Jr Harris J.S.

doi:10.1109/LEOS.2001.969293

Widely tunable micromachined optical filter with adjustable tuning characteristics

Chien-Chung Lin^*, J. Fu, Jr Harris J.S.

^*此作品的通信作者

光電系統研究所

研究成果: Conference article › 同行評審

摘要

A tunable optical filter with a top distributed Bragg refelctor (DBR) structure of Al₂O₃/GaAs was designed. The surface profile and mechanical properties of the device were tested using a Zygo NewView 5000 interferometer. The mechanical and optical measurements demonstrated the realization of a narrow linewidth, broad tuning range and low-tuning voltage.

原文	English
頁（從 - 到）	298-299
頁數	2
期刊	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
卷	1
DOIs	https://doi.org/10.1109/LEOS.2001.969293
出版狀態	Published - 12 11月 2001
事件	14th Annual Meeting of the IEEE Lasers and Electro-Optics Society - San Diego, CA, 美國持續時間: 11 11月 2001 → 15 11月 2001

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10.1109/LEOS.2001.969293

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title = "Widely tunable micromachined optical filter with adjustable tuning characteristics",

abstract = "A tunable optical filter with a top distributed Bragg refelctor (DBR) structure of Al2O3/GaAs was designed. The surface profile and mechanical properties of the device were tested using a Zygo NewView 5000 interferometer. The mechanical and optical measurements demonstrated the realization of a narrow linewidth, broad tuning range and low-tuning voltage.",

keywords = "Optical filters, Optical tuning, Laser tuning, Distributed Bragg reflectors, Gallium arsenide, Biomembranes, Voltage, Leg, Etching, Tunable circuits and devices",

author = "Chien-Chung Lin and J. Fu and {Harris J.S.}, Jr",

year = "2001",

month = nov,

day = "12",

doi = "10.1109/LEOS.2001.969293",

language = "English",

volume = "1",

pages = "298--299",

journal = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

issn = "1092-8081",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "14th Annual Meeting of the IEEE Lasers and Electro-Optics Society ; Conference date: 11-11-2001 Through 15-11-2001",

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TY - JOUR

T1 - Widely tunable micromachined optical filter with adjustable tuning characteristics

AU - Lin, Chien-Chung

AU - Fu, J.

AU - Harris J.S., Jr

PY - 2001/11/12

Y1 - 2001/11/12

N2 - A tunable optical filter with a top distributed Bragg refelctor (DBR) structure of Al2O3/GaAs was designed. The surface profile and mechanical properties of the device were tested using a Zygo NewView 5000 interferometer. The mechanical and optical measurements demonstrated the realization of a narrow linewidth, broad tuning range and low-tuning voltage.

AB - A tunable optical filter with a top distributed Bragg refelctor (DBR) structure of Al2O3/GaAs was designed. The surface profile and mechanical properties of the device were tested using a Zygo NewView 5000 interferometer. The mechanical and optical measurements demonstrated the realization of a narrow linewidth, broad tuning range and low-tuning voltage.

KW - Optical filters

KW - Optical tuning

KW - Laser tuning

KW - Distributed Bragg reflectors

KW - Gallium arsenide

KW - Biomembranes

KW - Voltage

KW - Leg

KW - Etching

KW - Tunable circuits and devices

UR - http://www.scopus.com/inward/record.url?scp=0035654096&partnerID=8YFLogxK

U2 - 10.1109/LEOS.2001.969293

DO - 10.1109/LEOS.2001.969293

M3 - Conference article

AN - SCOPUS:0035654096

SN - 1092-8081

VL - 1

SP - 298

EP - 299

JO - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

JF - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

T2 - 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society

Y2 - 11 November 2001 through 15 November 2001

ER -

Widely tunable micromachined optical filter with adjustable tuning characteristics

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