@article{2a092bd1c7384cfa8dfeb2047412ec6f,
title = "Wafer-scale MOCVD grown WS2 with normally off transistor behavior and its general application on different amorphous substrates",
abstract = "In this study, we investigated various approaches to manipulate the flake density, size, and thickness of two-dimensional transition metal dichalcogenides by independently tuning the precursors and process conditions of the metal-organic chemical vapor deposition system. Normally off device characteristics were realized for both the as-grown and transferred cases.",
author = "Wu, {Wen Chia} and Huang, {Kuan Ning} and Su, {Chien Ying} and Kei, {Chi Chung} and Kuo, {Cheng Huang} and Chien, {Chao Hsin}",
note = "Publisher Copyright: {\textcopyright} 2023 Author(s).",
year = "2023",
month = oct,
day = "30",
doi = "10.1063/5.0170017",
language = "English",
volume = "123",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "18",
}