TY - GEN
T1 - Wafer-Scale Functional Metasurfaces on Free-Standing Membranes
AU - Tseng, Ming Lun
AU - Leitis, Aleksandrs
AU - John-Herpin, Aurelian
AU - Kivshar, Yuri S.
AU - Altug, Hatice
N1 - Publisher Copyright:
© Optica Publishing Group 2022, © 2022 The Author(s)
PY - 2022
Y1 - 2022
N2 - We demonstrate free-standing metasurfaces made by a new wafer-scale and CMOS compatible nanofabrication method and produce nanostructures over large-area transparent oxide membranes. Applications include narrow-band spectral filtering, efficient light focusing, polarization control and optofluidic biosensors.
AB - We demonstrate free-standing metasurfaces made by a new wafer-scale and CMOS compatible nanofabrication method and produce nanostructures over large-area transparent oxide membranes. Applications include narrow-band spectral filtering, efficient light focusing, polarization control and optofluidic biosensors.
UR - http://www.scopus.com/inward/record.url?scp=85139952913&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85136805105
T3 - 2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings
BT - 2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings
PB - Optica Publishing Group (formerly OSA)
Y2 - 15 May 2022 through 20 May 2022
ER -