Vertical channel metal-oxide clusters as sensitive NO2 sensor with modulated response at room temperature

Ting Hsuan Huang; Pei Yi Li; Jin Bin Yang; Te Yao Liu; Mei Hsin Chen; Po-Tsun Liu; Hsin-Fei Meng; Chia Jung Lu; Olivier Soppera; Ping Hung Yeh; Hsiao-Wen Zan

doi:10.1016/j.snb.2021.131222

Vertical channel metal-oxide clusters as sensitive NO₂ sensor with modulated response at room temperature

Ting Hsuan Huang, Pei Yi Li, Jin Bin Yang, Te Yao Liu, Mei Hsin Chen, Po-Tsun Liu, Hsin-Fei Meng, Chia Jung Lu, Olivier Soppera, Ping Hung Yeh^*, Hsiao-Wen Zan

^*此作品的通信作者

研究成果: Article › 同行評審

5 引文斯高帕斯（Scopus）

摘要

We proposed room-temperature-operated sensitive NO₂ sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.

原文	English
文章編號	131222
頁（從 - 到）	1-10
頁數	10
期刊	Sensors and Actuators, B: Chemical
卷	354
DOIs	https://doi.org/10.1016/j.snb.2021.131222
出版狀態	Published - 1 3月 2022

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10.1016/j.snb.2021.131222

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title = "Vertical channel metal-oxide clusters as sensitive NO2 sensor with modulated response at room temperature",

abstract = "We proposed room-temperature-operated sensitive NO2 sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.",

keywords = "Gas sensor, Hydroxyl group, Metal oxide cluster, Sol-gel",

author = "Huang, {Ting Hsuan} and Li, {Pei Yi} and Yang, {Jin Bin} and Liu, {Te Yao} and Chen, {Mei Hsin} and Po-Tsun Liu and Hsin-Fei Meng and Lu, {Chia Jung} and Olivier Soppera and Yeh, {Ping Hung} and Hsiao-Wen Zan",

note = "Publisher Copyright: {\textcopyright} 2021",

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doi = "10.1016/j.snb.2021.131222",

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T1 - Vertical channel metal-oxide clusters as sensitive NO2 sensor with modulated response at room temperature

AU - Huang, Ting Hsuan

AU - Li, Pei Yi

AU - Yang, Jin Bin

AU - Liu, Te Yao

AU - Chen, Mei Hsin

AU - Liu, Po-Tsun

AU - Meng, Hsin-Fei

AU - Lu, Chia Jung

AU - Soppera, Olivier

AU - Yeh, Ping Hung

AU - Zan, Hsiao-Wen

PY - 2022/3/1

Y1 - 2022/3/1

N2 - We proposed room-temperature-operated sensitive NO2 sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.

AB - We proposed room-temperature-operated sensitive NO2 sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.

KW - Gas sensor

KW - Hydroxyl group

KW - Metal oxide cluster

KW - Sol-gel

UR - http://www.scopus.com/inward/record.url?scp=85121132434&partnerID=8YFLogxK

U2 - 10.1016/j.snb.2021.131222

DO - 10.1016/j.snb.2021.131222

M3 - Article

AN - SCOPUS:85121132434

SN - 0925-4005

VL - 354

SP - 1

EP - 10

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

M1 - 131222

ER -

Vertical channel metal-oxide clusters as sensitive NO2 sensor with modulated response at room temperature

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Vertical channel metal-oxide clusters as sensitive NO₂ sensor with modulated response at room temperature