Ultra shallow P+/N junctions fabricated by plasma doping and all solid state laser annealing

Kazuo Tsutsui*, Yuichiro Sasaki, Cheng Guo Jin, Hideki Tamura, Buji Mizuno, Ryota Higaki, Takahisa Sato, Kenta Majima, Shun Ichiro Ohmi, Hiroshi Iwai

*此作品的通信作者

研究成果: Paper同行評審

3 引文 斯高帕斯(Scopus)

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Engineering & Materials Science