TY - JOUR
T1 - Two-dimensional pheromone propagation controller applied to run-to-run control for semiconductor manufacturing
AU - Lee, Der Shui
AU - Lee, An-Chen
PY - 2013/5
Y1 - 2013/5
N2 - This paper presents a new perspective on process control, called the two-dimensional pheromone propagation controller (2D-PPC), which considers the spatial information about disturbances of the process within a wafer to generate new predicted intercepts of the models for the subsequent use in time-effect controller (the exponentially weighted moving average, EWMA, in this study). The 2D-PPC assumes that the disturbances have their own behavior and affect others nearby in a wafer at a run; thus, it involves the "space-effect" among disturbances of the process at measurement positions within a wafer. The framework of the space-time controller (STC), which interlaces the time-effect controller and the space-effect 2D-PPC is constructed, and the stability analysis and intrinsic characteristics of the STC are discussed. Simulations are conducted using two-dimensional anthropogenic disturbances generated from fabrication data. The results show that the STC has better performance as compared to the conventional time-effect controllers. From implementation view point, since STC does not change the original code of time-effect controller, it can be easily implemented in the current process control loop by only adding an additional space-effect controller.
AB - This paper presents a new perspective on process control, called the two-dimensional pheromone propagation controller (2D-PPC), which considers the spatial information about disturbances of the process within a wafer to generate new predicted intercepts of the models for the subsequent use in time-effect controller (the exponentially weighted moving average, EWMA, in this study). The 2D-PPC assumes that the disturbances have their own behavior and affect others nearby in a wafer at a run; thus, it involves the "space-effect" among disturbances of the process at measurement positions within a wafer. The framework of the space-time controller (STC), which interlaces the time-effect controller and the space-effect 2D-PPC is constructed, and the stability analysis and intrinsic characteristics of the STC are discussed. Simulations are conducted using two-dimensional anthropogenic disturbances generated from fabrication data. The results show that the STC has better performance as compared to the conventional time-effect controllers. From implementation view point, since STC does not change the original code of time-effect controller, it can be easily implemented in the current process control loop by only adding an additional space-effect controller.
KW - EWMA
KW - Process control
KW - Space-effect controller
KW - Two-dimensional digital pheromone infrastructure
KW - Two-dimensional pheromone propagation controller
UR - http://www.scopus.com/inward/record.url?scp=84880573881&partnerID=8YFLogxK
U2 - 10.1007/s00170-012-4377-8
DO - 10.1007/s00170-012-4377-8
M3 - Article
AN - SCOPUS:84880573881
SN - 0268-3768
VL - 66
SP - 917
EP - 936
JO - International Journal of Advanced Manufacturing Technology
JF - International Journal of Advanced Manufacturing Technology
IS - 5-8
ER -