Two-dimensional designed fabrication of subwavelength grating HCG mirror on silicon-on-insulator

Shen Che Huang, Kuo Bin Hong, Tien-chang Lu, Sailing He

研究成果: Conference contribution同行評審

摘要

We designed and fabricated a two dimensional high contrast subwavelength grating (HCG) mirrors. The computer-aided software was employed to verify the structural parameters including grating periods and filling factors. From the optimized simulation results, the designed HCG structure has a wide reflection stopband (reflectivity (R) >90%) of over 200 nm, which centered at telecommunication wavelength. The optimized HCG mirrors were fabricated by electron beam lithography and inductively coupled plasma process technique. The experimental result was almost consistent with calculated data. This achievement should have an impact on numerous photonic devices helpful attribution to the integrated HCG VCSELs in the future.

原文English
主出版物標題High Contrast Metastructures V
編輯David Fattal, Connie J. Chang-Hasnain, Weimin Zhou, Fumio Koyama
發行者SPIE
ISBN(電子)9781628419924
DOIs
出版狀態Published - 1 1月 2016
事件High Contrast Metastructures V - San Francisco, United States
持續時間: 17 2月 201618 2月 2016

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
9757
ISSN(列印)0277-786X
ISSN(電子)1996-756X

Conference

ConferenceHigh Contrast Metastructures V
國家/地區United States
城市San Francisco
期間17/02/1618/02/16

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