Transportation model establishment of InGaZnO for thin film transistor device application

Li Feng Teng*, Po-Tsun Liu, Yi Teh Chou, Yang Shun Fan

*此作品的通信作者

研究成果: Paper同行評審

1 引文 斯高帕斯(Scopus)

摘要

The transportation model of on electrical metastability of a-InGaZnO TFT is established. The generation of oxygen vacancies by the annealing in a vacuum led to an increased Ioff and large Vth shifts, while N2 and O2 ambience effectively improve the device performance. A physical mechanism is also reasonably proposed.

原文English
頁面1845-1847
頁數3
出版狀態Published - 1 12月 2010
事件17th International Display Workshops, IDW'10 - Fukuoka, Japan
持續時間: 1 12月 20103 12月 2010

Conference

Conference17th International Display Workshops, IDW'10
國家/地區Japan
城市Fukuoka
期間1/12/103/12/10

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