TY - JOUR
T1 - Transmission electron microscopy of the formation of nickel silicides
AU - Föll, H.
AU - Ho, P. S.
AU - Tu, King-Ning
PY - 1982/1/1
Y1 - 1982/1/1
N2 - The formation of Ni2Si, Nisi and NiSi2 on Si has been studied by TEM, particularly with cross-sectional specimens and by high-resolution imaging. Both Ni2Si and Nisi showed an oriented growth on (111) substrates, while NiSi2 grew epitaxially on {111} and {100} Si. Ni2Si assumed two different pseudo-hexagonal orientations whereas Nisi was found to be truly hexagonal instead of orthorhombic on {111} Si. TEM of cross-sectional specimens showed that all the silicide-Si interfaces were quite rough, except in the case of Nisi2 where it was highly facetted. When Ni2Si and Nisi were present simultaneously, they often were separated by an interfacial layer, ∼3 nm thick, which might be related to Kirkendall voids or to remainders of the native oxide on the Si substrate. Cross-sectional views of misfit dislocations in the epitaxial interfaces have been obtained and analysed in terms of their Burgers vector and spacing.
AB - The formation of Ni2Si, Nisi and NiSi2 on Si has been studied by TEM, particularly with cross-sectional specimens and by high-resolution imaging. Both Ni2Si and Nisi showed an oriented growth on (111) substrates, while NiSi2 grew epitaxially on {111} and {100} Si. Ni2Si assumed two different pseudo-hexagonal orientations whereas Nisi was found to be truly hexagonal instead of orthorhombic on {111} Si. TEM of cross-sectional specimens showed that all the silicide-Si interfaces were quite rough, except in the case of Nisi2 where it was highly facetted. When Ni2Si and Nisi were present simultaneously, they often were separated by an interfacial layer, ∼3 nm thick, which might be related to Kirkendall voids or to remainders of the native oxide on the Si substrate. Cross-sectional views of misfit dislocations in the epitaxial interfaces have been obtained and analysed in terms of their Burgers vector and spacing.
UR - http://www.scopus.com/inward/record.url?scp=0019901090&partnerID=8YFLogxK
U2 - 10.1080/01418618208243901
DO - 10.1080/01418618208243901
M3 - Article
AN - SCOPUS:0019901090
VL - 45
SP - 31
EP - 47
JO - Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
JF - Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
SN - 0141-8610
IS - 1
ER -