TiN-C Based CMOS MEMS Pirani Gauge for on-Chip Pressure Measurement

Manu Garg, Fang Wei Tsai, Khanjan Joshi, Yi Chiu, Pushpapraj Singh

研究成果: Conference contribution同行評審

1 引文 斯高帕斯(Scopus)

摘要

The paper presents a monolithically integrable CMOS back-end-of-line (BEOL) integrated MEMS Pirani gauge. The proposed idea is implemented using a TiN-C platform based on a 0.35 μm 2P4M commercial CMOS process. In the given implementation, TiN in the interconnect layer is explored as a heating element. Owing to the lower thermal conductivity (4 W/m.K) of TiN, excellent thermal isolation of intermetal dielectric layers, and a narrow vertical conduction gap, the gauge exhibits a wide dynamic range from 26 Pa to 106 Pa. Experimental results of the fabricated devices are in excellent agreement with the simulated curve with a maximum error of 0.04%. Additionally, the fabricated gauge demonstrates excellent reproducibility while maintaining an acceptable error margin of ≤ 0.01 % over the entire range.

原文English
主出版物標題2023 IEEE SENSORS, SENSORS 2023 - Conference Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9798350303872
DOIs
出版狀態Published - 2023
事件2023 IEEE SENSORS, SENSORS 2023 - Vienna, 奧地利
持續時間: 29 10月 20231 11月 2023

出版系列

名字Proceedings of IEEE Sensors
ISSN(列印)1930-0395
ISSN(電子)2168-9229

Conference

Conference2023 IEEE SENSORS, SENSORS 2023
國家/地區奧地利
城市Vienna
期間29/10/231/11/23

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