Thickness determination of poly-Si/poly-oxide/poly-Si/SiO₂/Si structure by ellipsometer

Keyphrases

• Poly-Si 100%
• Oxides 100%
• Thickness Determination 100%
• Si Structures 100%
• Si-SiO2 100%
• Ellipsometer 100%
• Ellipsometry Measurement 50%
• Cross-sectional TEM 25%
• Measurement Method 25%

Chemical Engineering

• Polysilicon 100%
• Ellipsometry 50%

Material Science

• Oxide Compound 100%