Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process

Jin-Chern Chiou*, Lei Chun Chou, You Liang Lai, Sheng-Chieh Huang

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

This paper focuses on implementing a novel thermal switch and variable capacitance design by using commercially available CMOS MEMS process which can approach in a micro electrostatic converter system. In this system, there are two major parts. First is the variable capacitance, and the second is the thermal switch. In the variable capacitance, it implement by UMC 0.18μm one-poly seven-metal (1P7M) CMOS MEMS process. In the post-process, the silicon-oxidation have been released and the gap between two metal layers filled with PDMS (Polydimethylsiloxane). Filling with PDMS is to significantly increase C max.

原文English
主出版物標題2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
頁面733-737
頁數5
DOIs
出版狀態Published - 1 6月 2012
事件7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan
持續時間: 5 3月 20128 3月 2012

出版系列

名字2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Conference

Conference7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
國家/地區Japan
城市Kyoto
期間5/03/128/03/12

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