Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process

Jin-Chern Chiou; Lei Chun Chou; You Liang Lai; Sheng-Chieh Huang

doi:10.1109/NEMS.2012.6196879

Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process

Jin-Chern Chiou^*, Lei Chun Chou, You Liang Lai, Sheng-Chieh Huang

^*此作品的通信作者

電機工程學系

研究成果: Conference contribution › 同行評審

摘要

This paper focuses on implementing a novel thermal switch and variable capacitance design by using commercially available CMOS MEMS process which can approach in a micro electrostatic converter system. In this system, there are two major parts. First is the variable capacitance, and the second is the thermal switch. In the variable capacitance, it implement by UMC 0.18μm one-poly seven-metal (1P7M) CMOS MEMS process. In the post-process, the silicon-oxidation have been released and the gap between two metal layers filled with PDMS (Polydimethylsiloxane). Filling with PDMS is to significantly increase C _max.

原文	English
主出版物標題	2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
頁面	733-737
頁數	5
DOIs	https://doi.org/10.1109/NEMS.2012.6196879
出版狀態	Published - 1 6月 2012
事件	7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, 日本持續時間: 5 3月 2012 → 8 3月 2012

出版系列

名字	2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Conference

Conference	7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
國家/地區	日本
城市	Kyoto
期間	5/03/12 → 8/03/12

存取文件

10.1109/NEMS.2012.6196879

其它文件與鏈接

Link to publication in Scopus

引用此

Chiou, J.-C., Chou, L. C., Lai, Y. L., & Huang, S.-C. (2012). Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process. 於 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 (頁 733-737). 文章 6196879 (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012). https://doi.org/10.1109/NEMS.2012.6196879

Chiou, Jin-Chern ; Chou, Lei Chun ; Lai, You Liang 等. / Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process. 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. 頁 733-737 (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012).

@inproceedings{758f85ed23b844219ad55cc7f822e761,

title = "Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process",

abstract = "This paper focuses on implementing a novel thermal switch and variable capacitance design by using commercially available CMOS MEMS process which can approach in a micro electrostatic converter system. In this system, there are two major parts. First is the variable capacitance, and the second is the thermal switch. In the variable capacitance, it implement by UMC 0.18μm one-poly seven-metal (1P7M) CMOS MEMS process. In the post-process, the silicon-oxidation have been released and the gap between two metal layers filled with PDMS (Polydimethylsiloxane). Filling with PDMS is to significantly increase C max.",

author = "Jin-Chern Chiou and Chou, {Lei Chun} and Lai, {You Liang} and Sheng-Chieh Huang",

year = "2012",

month = jun,

day = "1",

doi = "10.1109/NEMS.2012.6196879",

language = "English",

isbn = "9781467311243",

series = "2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012",

pages = "733--737",

booktitle = "2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012",

note = "7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 ; Conference date: 05-03-2012 Through 08-03-2012",

}

Chiou, J-C, Chou, LC, Lai, YL & Huang, S-C 2012, Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process. 於 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012., 6196879, 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, 頁 733-737, 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, 日本, 5/03/12. https://doi.org/10.1109/NEMS.2012.6196879

Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process. / Chiou, Jin-Chern; Chou, Lei Chun; Lai, You Liang 等.
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 733-737 6196879 (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012).

研究成果: Conference contribution › 同行評審

TY - GEN

T1 - Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process

AU - Chiou, Jin-Chern

AU - Chou, Lei Chun

AU - Lai, You Liang

AU - Huang, Sheng-Chieh

PY - 2012/6/1

Y1 - 2012/6/1

N2 - This paper focuses on implementing a novel thermal switch and variable capacitance design by using commercially available CMOS MEMS process which can approach in a micro electrostatic converter system. In this system, there are two major parts. First is the variable capacitance, and the second is the thermal switch. In the variable capacitance, it implement by UMC 0.18μm one-poly seven-metal (1P7M) CMOS MEMS process. In the post-process, the silicon-oxidation have been released and the gap between two metal layers filled with PDMS (Polydimethylsiloxane). Filling with PDMS is to significantly increase C max.

AB - This paper focuses on implementing a novel thermal switch and variable capacitance design by using commercially available CMOS MEMS process which can approach in a micro electrostatic converter system. In this system, there are two major parts. First is the variable capacitance, and the second is the thermal switch. In the variable capacitance, it implement by UMC 0.18μm one-poly seven-metal (1P7M) CMOS MEMS process. In the post-process, the silicon-oxidation have been released and the gap between two metal layers filled with PDMS (Polydimethylsiloxane). Filling with PDMS is to significantly increase C max.

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DO - 10.1109/NEMS.2012.6196879

M3 - Conference contribution

AN - SCOPUS:84861554026

SN - 9781467311243

T3 - 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

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Chiou JC, Chou LC, Lai YL, Huang SC. Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process. 於 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 733-737. 6196879. (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012). doi: 10.1109/NEMS.2012.6196879

Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process

摘要

出版系列

Conference

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指紋

引用此