@article{741a33ee27384998ae800cc1c671a304,
title = "Thermal diffusivity in diamond, SiC xN y and BC xN y ",
abstract = "Thermal diffusivity (α) of free standing diamond, amorphous silicon carbon nitride (a-SiC xN y) and boron carbon nitride (a-BC xN y) thin films on crystalline silicon, has been studied using the travelling wave technique. Thermal diffusivity in all of them was found to depend on the microstructure. For a-SiC xN y and a-BC xN y thin films two distinct regimes of high and low carbon contents were observed in which the microstructure changed considerably and that has a profound effect on the thermal diffusivity. The defective C(sp)-N phase plays a key role in determining the film properties.",
keywords = "Microstructure, Photoelectron spectroscopy, Physical vapour deposition, Thermal conductivity",
author = "S. Chattopadhyay and Chien, {S. C.} and Chen, {L. C.} and Chen, {K. H.} and Lee, {H. Y.}",
note = "Funding Information: This work was carried out under a project funded by the National Science Council, Taiwan, under Contract Nos. NSC89-2112-M002-085, and NSC89-2119-M001-011. We acknowledge the help of Prof. P. Hess and G. Lehmann, of the Institute of Physical Chemistry, University of Heidelberg, Germany, for the density measurements of the a-SiC x N y films and many helpful discussions. One of the author (S.C) acknowledges the award of a post-doctoral fellowship by the National Science Council, Taiwan.",
year = "2002",
month = mar,
doi = "10.1016/S0925-9635(01)00606-9",
language = "English",
volume = "11",
pages = "708--713",
journal = "Diamond and Related Materials",
issn = "0925-9635",
publisher = "Elsevier BV",
number = "3-6",
}