Theoretical and experimental study of an axial flow cyclone for fine particle removal in vacuum conditions

Chuen-Tinn Tsai*, Daren Ren Chen, Hungmin Chein, Sheng Chieh Chen, Jian Lun Roth, Yu Du Hsu, Weiling Li, Pratim Biswas

*此作品的通信作者

    研究成果: Article同行評審

    32 引文 斯高帕斯(Scopus)

    摘要

    An axial flow cyclone to remove fine particles at low pressure conditions (6-23 torr) was designed and tested. The inner diameter of the cyclone is 3.0 cm and tested flow rates are 0.455 and 1.0 slpm. A theoretical evaluation was first carried out to calculate the particle collection efficiency and cutoff diameter for the axial flow cyclone. Experiments were then conducted to test the theory at different flow rates, pressures and cyclone designs. It was demonstrated that at sufficiently low pressure of 6 torr (flow rate=0.455 slpm), the axial flow cyclone is able to remove particles below 100 nm efficiently, and the flow Reynolds number was found to have a great effect on the particle collection efficiency.

    原文English
    頁(從 - 到)1105-1118
    頁數14
    期刊Journal of Aerosol Science
    35
    發行號9
    DOIs
    出版狀態Published - 1 一月 2004

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