The recovery of sulfuric acid from spent piranha solution over a dimensionally stable anode (DSA) Ti-RuO₂ electrode

Piranha solution is a highly acidic mixture of sulfuric acid and hydrogen peroxide. The present study aimed at developing a dimensionally stable anode (DSA), made of titanium metal foil coated with Ruthenium Dioxide (RuO₂), for the electrochemical oxidation of hydrogen peroxide in the presence of strong sulfuric acid under ambient conditions. Results showed that hydrogen peroxide in the piranha solution was fully degraded in 5 h under a constant current of 2 A (or current density of 0.32 A-cm^-2). The oxidation kinetics of hydrogen peroxide followed the Langmuir-Hinshelwood model. The observed rate constant was a function of applied current. The initial current efficiency was 17.5% at 0.5 A (or 0.08 A-cm^-2) and slightly decreased to about 13.5% at applied current between 1.3 and 1.5 A (or current density of 0.208 and 0.24 A-cm^-2). Results showed the capability and feasibility of the electrochemical oxidation process for the recovery of sulfuric acid from the spent piranha solution in semiconductor industrial installations or general laboratories.