The investigation of nano-roughening effect on the reliability enhancement of adhesive bond for NEMS manufacture application

Keyphrases

• Stamping 100%
• Silicon Substrate 100%
• Adhesive Bonding 100%
• Reliability Enhancement 100%
• Etching Process 50%
• Bonding Strength 50%
• Leakage Reduction 50%
• Average Roughness 50%
• Etching Mask 50%
• Microfabrication 50%
• Etch Characteristics 50%
• Bonding Interface 50%
• Glass Frit Bonding 50%
• Strength Enhancement 50%
• Hermetic Encapsulation 50%
• Silicon Etching 50%
• Adhesive Characteristics 50%

Engineering

• Silicon Substrate 100%
• Adhesive Bond 100%
• Experimental Result 50%
• Microelectromechanical System 50%
• Microfabrication 50%
• Bonding Strength 50%
• Etching Process 50%
• Glass Bonding 50%
• Strength Enhancement 50%

Material Science

• Silicon 100%
• Microelectromechanical System 25%
• Microfabrication 25%