The implementation of a novel magnified cascade configuration using a vertical electrostatic actuator

Jin-Chern Chiou, C. F. Kuo, Y. J. Lin

研究成果: Conference contribution同行評審

摘要

An electrostatic actuator with novel cascade configuration called Cascade Vertical Actuator (CVA) is developed to magnify the actuation stroke. The CVA combines the vertical comb drive and multi-stage structure to form a stacked actuation configuration that can be used to overcome the stroke constrain of a single vertical comb drive. The static FEM simulation and dynamic modeling are used to verify the proposed design. The CVA device is fabricated through a standard 0.35μn 2P4M (double polysilicon quadruple metal) CMOS process and post-CMOS process. Experimental results indicated the stroke of the proposed CVA can magnify three times than the standard vertical comb drive with the same chip size.

原文English
主出版物標題2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
頁面913-916
頁數4
出版狀態Published - 1 12月 2006
事件2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006 - Cincinnati, OH, United States
持續時間: 17 6月 200620 6月 2006

出版系列

名字2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
2

Conference

Conference2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
國家/地區United States
城市Cincinnati, OH
期間17/06/0620/06/06

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