The Impact of Nano Device Parameters Variations and Scaling Strategy for High Frequency Performance Enhancement in Nanoscale CMOS

Adhi Cahyo Wijaya, Jinq Min Lin, Jyh Chyurn Guo

研究成果: Conference contribution同行評審

摘要

This paper presents a new observation in sub-60nm multi-finger (MF) nMOSFETs with nearly the same dc characteristics like channel current (IDS) and transconductance (gm) from different dies/lots but a dramatic difference at high frequency parameters, such as intrinsic gate capacitances (Cgg) and unit gain cut-off frequency fT after a clean deembedding to the bottom metal. The experimental results reveal an important finding that nanoscale devices even with inter-dies/lots process variations may keep the golden die target for dc and logic circuits performance but exhibit a significant deviation in high frequency performance. A comprehensive high frequency characterization and precise device parameters extraction has been carried out on various MF nMOSFETs to identify the root causes and explore the underlying mechanisms.

原文English
主出版物標題2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9781665409230
DOIs
出版狀態Published - 2022
事件2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022 - Hsinchu, Taiwan
持續時間: 18 4月 202221 4月 2022

出版系列

名字2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022

Conference

Conference2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022
國家/地區Taiwan
城市Hsinchu
期間18/04/2221/04/22

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