The impact of MOSFET layout dependent stress on high frequency characteristics and flicker noise

Kuo Liang Yeh*, Chih You Ku, Jyh-Chyurn Guo

*此作品的通信作者

    研究成果: Conference contribution同行評審

    1 引文 斯高帕斯(Scopus)

    摘要

    Layout dependent stress in 90 nm MOSFET and its impact on high frequency performance and flicker noise has been investigated Donut MOSFETs were created to eliminate the transverse stress from shallow trench isolation (STI). Both NMOS and PMOS can benefit from the donut layout in terms of higher effective mobility μeff and cutoff frequency fT, as well as lower flicker noise. The measured flicker noise follows number fluctuation model for NMOS and mobility fluctuation model for PMOS, respectively. The reduction of flicker noise suggests the reduction of STI generated traps and the suppression of mobility fluctuation due to eliminated transverse stress using donut structure.

    原文English
    主出版物標題Proceedings of the 2010 IEEE Radio Frequency Integrated Circuits Symposium, RFIC 2010
    頁面577-580
    頁數4
    DOIs
    出版狀態Published - 16 7月 2010
    事件2010 IEEE Radio Frequency Integrated Circuits Symposium, RFIC 2010 - Anaheim, CA, United States
    持續時間: 23 5月 201025 5月 2010

    出版系列

    名字Digest of Papers - IEEE Radio Frequency Integrated Circuits Symposium
    ISSN(列印)1529-2517

    Conference

    Conference2010 IEEE Radio Frequency Integrated Circuits Symposium, RFIC 2010
    國家/地區United States
    城市Anaheim, CA
    期間23/05/1025/05/10

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