TY - GEN
T1 - The effect of voltage and diameter of anodic porous alumina in acid solutions
AU - Chen, Guo Dung
AU - Liu, Cheng Yang
PY - 2009
Y1 - 2009
N2 - Anodic aluminum oxide (AAO) is fabricated by electrochemical anodization of aluminum. This work is focused on the optimization on the diameter of the pores in anodic aluminum oxide (AAO) template. The AI sheet (20 × 20 × 0.15 mm) and AI (1 μm) deposited on silicon wafers (p-type) were used for anodic aluminum oxide (AAO) growth. The growing time, temperatures, kinds of electrolyte, working voltage were used to optimize the anodization of alumina. Besides, the effect of working voltage on the diameter of pores was also investigated. The porous array of alumina film has a uniform; closely packs honeycomb structure approximately 15 nm to 150 nm in diameter. Because of this, the structure is a good material for photonic crystal application in the future. This structure of alumina film is observed by scanning electrical microscope (SEM), and the density of porous channels was also obtained (1010 /cm2).
AB - Anodic aluminum oxide (AAO) is fabricated by electrochemical anodization of aluminum. This work is focused on the optimization on the diameter of the pores in anodic aluminum oxide (AAO) template. The AI sheet (20 × 20 × 0.15 mm) and AI (1 μm) deposited on silicon wafers (p-type) were used for anodic aluminum oxide (AAO) growth. The growing time, temperatures, kinds of electrolyte, working voltage were used to optimize the anodization of alumina. Besides, the effect of working voltage on the diameter of pores was also investigated. The porous array of alumina film has a uniform; closely packs honeycomb structure approximately 15 nm to 150 nm in diameter. Because of this, the structure is a good material for photonic crystal application in the future. This structure of alumina film is observed by scanning electrical microscope (SEM), and the density of porous channels was also obtained (1010 /cm2).
KW - Anodic aluminum oxide
KW - Electrochemical process
KW - Photonic crystal
UR - http://www.scopus.com/inward/record.url?scp=77958014637&partnerID=8YFLogxK
U2 - 10.1109/NANOMED.2009.5559105
DO - 10.1109/NANOMED.2009.5559105
M3 - Conference contribution
AN - SCOPUS:77958014637
SN - 9781424455287
T3 - 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
SP - 125
EP - 128
BT - 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
T2 - 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
Y2 - 18 October 2009 through 21 October 2009
ER -