The Effect of Electromigration and Stress Migration on NT-Cu RDLs Passivated with Titanium Dioxide

Yi Quan Lin, Ching Yu Tang, Yu Wen Hung, You Yi Lin, Chih Chen

研究成果: Conference contribution同行評審

摘要

Due to the shrinking size of chip devices, the current density carried by redistribution layer (RDLs) increases. We used titanium dioxide (TiO2) as the passivation layer to enhance the lifetime of electro migration. The lifetime of TiO2-capped NT-Cu RDLs increased about 2 times compared to those coated with polyimide (PI). In this study, we found the mechanism of failure on NT-Cu RDLs capped with TiO2 was the electro migration-induced voiding combined with the stress migration.

原文English
主出版物標題2024 International Conference on Electronics Packaging, ICEP 2024
發行者Institute of Electrical and Electronics Engineers Inc.
頁面155-156
頁數2
ISBN(電子)9784991191176
DOIs
出版狀態Published - 2024
事件23rd International Conference on Electronics Packaging, ICEP 2024 - Toyama, 日本
持續時間: 17 4月 202420 4月 2024

出版系列

名字2024 International Conference on Electronics Packaging, ICEP 2024

Conference

Conference23rd International Conference on Electronics Packaging, ICEP 2024
國家/地區日本
城市Toyama
期間17/04/2420/04/24

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