The design and characteristic study of a 3-dimensional piezoelectric nano-positioner

Yu Chi Wang*, Li Kang Chen, Shao-Kang Hung

*此作品的通信作者

研究成果: Conference contribution同行評審

2 引文 斯高帕斯(Scopus)

摘要

This paper presents a mechanical design method of "thin column group" guidance and multi-actuator parallel mechanism for three degrees of freedom translations, since multiactuator parallel mechanism is utilized to implement planar motions which are general requirements for the nano-positioner. The traveling range of this nano-positioner is 5 μm in the X-, Ydirections and in the vertical direction. The three-dimensional nano-positioner has several advantages such as low-cost, highprecision, and can be applied to the assembly, processing, biotech and medicine detection and semi-conduct industry. In the feedback controller, we choose MATLAB/Simulink, Real-Time Workshop, a software widely used by the academic community, as tools to study rapid controller prototyping. The parameters are controlled based on proportion-integral control law that is easily used and has a good performance.

原文English
主出版物標題Proceedings of SICE Annual Conference 2010, SICE 2010 - Final Program and Papers
發行者Society of Instrument and Control Engineers (SICE)
頁面3179-3183
頁數5
ISBN(列印)9784907764364
出版狀態Published - 1 一月 2010

出版系列

名字Proceedings of the SICE Annual Conference

指紋

深入研究「The design and characteristic study of a 3-dimensional piezoelectric nano-positioner」主題。共同形成了獨特的指紋。

引用此