Symmetric vertical-channel nickel-salicided poly-Si thin-film transistors with self-aligned oxide overetching structures

Yi Hong Wu*, Po Yi Kuo, Yi Hsien Lu, Yi Hsuan Chen, Tsung Yu Chiang, Kuan Ti Wang, Li Chen Yen, Tien-Sheng Chao

*此作品的通信作者

研究成果: Article同行評審

4 引文 斯高帕斯(Scopus)

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Keyphrases

Engineering

Material Science