@inproceedings{c9a13dfc8fb9447daff6f9ff6f375a84,
title = "Suppression of photo-bias instability of transparent amorphous indium oxide thin film transistors by in situ nitrogen doping",
abstract = "In this study, we analyzed the In2O3 thin films with different nitrogen flow rate during sputtering as the transistor's channel layer. The electrical analysis including device's reliability and material analysis were both examined.",
keywords = "Indium oxide, Nitrogen, Thin-film transistors",
author = "Chang, {Chih Hsiang} and Po-Tsun Liu and Tsai, {Yun Chu}",
note = "Publisher Copyright: {\textcopyright} 2015 Society for Information Display.; 22nd International Display Workshops, IDW 2015 ; Conference date: 09-12-2015 Through 11-12-2015",
year = "2015",
language = "English",
series = "Proceedings of the International Display Workshops",
publisher = "International Display Workshops",
pages = "623--625",
booktitle = "22nd International Display Workshops, IDW 2015",
}
