SU-8 for microsystem fabrication

研究成果: Article › 同行評審

1 引文斯高帕斯（Scopus）

其它文件與鏈接

@article{a8e587411bd448ccb49181b5112c9a83,

title = "SU-8 for microsystem fabrication",

author = "Yi Chiu and Yu-Ting Cheng",

year = "2015",

month = jan,

day = "1",

language = "English",

volume = "2015-January",

pages = "220--255",

journal = "RSC Smart Materials",

issn = "2046-0066",

publisher = "Royal Society of Chemistry",

number = "13",

}