Study on Amorphous InGaZnO thin film transistors optimized by oxygen neutral beam treatment

C. H. Wu, K. M. Chang, Y. M. Chen, B. W. Huang, Y. X. Zhang, S. Samukawa, S. Noda, Y. M. Li, S. J. Wang, B. J. Shih, Kow-Ming Chang, C. H. Wu

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Earth and Planetary Sciences

Engineering