Study of oxidation and wear behaviors of (Nb,Cr)N thin films using Raman spectroscopy

J. H. Hsieh*, C. Li, A. L.K. Tan, C. K. Poh, N. J. Tan

*此作品的通信作者

研究成果: Article同行評審

20 引文 斯高帕斯(Scopus)

摘要

Several (Nb,Cr)N coatings were deposited by an unbalanced magnetron sputtering system. Following the deposition, the tribological properties of these coatings were studied using a ball-on-disk setup with alumina balls. The wear debris was then characterized using Raman spectroscopy to identify oxides generated during the wear process to gain a better understanding of tribochemical reactions. The results show that Cr2O3 and CrNbO4 constitute the debris obtained from Cr-rich coatings, while Nb2O5· n H2O is the major constituent of the debris formed on Nb-rich coatings. From the study of the debris, the difference in wear mechanism between Cr-rich and Nb-rich coatings is explained and confirmed.

原文English
頁(從 - 到)299-305
頁數7
期刊Surface and Coatings Technology
177-178
DOIs
出版狀態Published - 30 1月 2004

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