Study of Atmospheric-Pressure Plasma Enhanced Chemical Vapor Deposition Fabricated Indium Gallium Zinc Oxide Thin Film Transistors with In-Situ Hydrogen Plasma Treatment

  • Yi-Ming Chen
  • , Chien-Hung Wu*
  • , Kow-Ming Chang
  • , Yu-Xin Zhang
  • , Ni Xu
  • , Tsung-Ying Yu
  • , Albert Chin
    • *此作品的通信作者

研究成果: Article › 同行評審

指紋

深入研究「Study of Atmospheric-Pressure Plasma Enhanced Chemical Vapor Deposition Fabricated Indium Gallium Zinc Oxide Thin Film Transistors with In-Situ Hydrogen Plasma Treatment」主題。共同形成了獨特的指紋。
排序方式

Keyphrases

Engineering

Material Science

Chemical Engineering