Structure and electrochemical properties of nitrogen doped diamond-like carbon film synthesized by low temperature neutral beam enhanced chemical vapor deposition

Keyphrases

• Low Temperature 100%
• Chemical Vapor Deposition 100%
• Structure-property Relationships 100%
• Electrochemical Properties 100%
• Nitrogen Doping 100%
• Diamond-like 100%
• Neutral Beam 100%
• Carbon Film 100%
• Fourier Transform Infrared Spectroscopy (FT-IR) 50%
• X-ray Photoelectron Spectroscopy 50%
• Electrical Conductivity 50%
• Room Temperature 50%
• Substrate Temperature 50%
• Nitrogen Atom 50%
• Aromatic Ring 50%
• Amines 50%
• Film Structure 50%
• Cyclic Voltammogram 50%
• C-ratio 50%
• Electroanalysis 50%
• Damage-free 50%
• Doped Nitrogen 50%
• Film Synthesis 50%
• Sensor Materials 50%
• Electron Damage 50%

Material Science

• Film 100%
• Chemical Vapor Deposition 100%
• Electrochemical Property 100%
• Diamond Like Carbon Films 100%
• X-Ray Photoelectron Spectroscopy 33%
• Fourier Transform Infrared Spectroscopy 33%
• Electrical Conductivity 33%