TY - JOUR
T1 - Structural analysis of TiO2 and TiO2-Ag thin films and their antibacterial behaviors
AU - Hsieh, J. H.
AU - Yu, R. B.
AU - Chang, Y. K.
AU - Li, C.
PY - 2012
Y1 - 2012
N2 - TiO2 (rutile and anatase) thin films was first prepared using reactive sputtering, in an Ar+O2 plasma. In the 2nd stage of the experiment, various amounts (3, 7, and 10 at. %) of Ag was doped into the rutile film in order to form TiO2-Ag thin films. These films were annealed for one hour in Ar atmosphere, at 300, 400, and 500 °C. The films' structures were then examined using X-ray diffractometry. FESEM (field-emission scaning electron microscopy) was used to investigate the surface emergence of Ag particles. As for the examination of optical band gaps and absorption of these films, UV-Vis-NIR photometer was used. The results show that, in as-deposited condition, the addition of Ag might disrupt the growth of crystalline structure and cause the formation of amorphous films. After annealing, it is found that the structure tends to become anatase phase which is a metastable phase between amorphous titanium oxide and rutile. More importantly, the absorption of the Ag-doped films would be enhanced in the visible-light range. Some of the enhancement is clearly due to plasmon resonance effect. The Ag-doped samples have shown some antibacterial effect in dark. When irradiated with light, the samples show a synergistic behavior combining the bactericidal effect of Ag ions and photocatalytic effect of TiO2.
AB - TiO2 (rutile and anatase) thin films was first prepared using reactive sputtering, in an Ar+O2 plasma. In the 2nd stage of the experiment, various amounts (3, 7, and 10 at. %) of Ag was doped into the rutile film in order to form TiO2-Ag thin films. These films were annealed for one hour in Ar atmosphere, at 300, 400, and 500 °C. The films' structures were then examined using X-ray diffractometry. FESEM (field-emission scaning electron microscopy) was used to investigate the surface emergence of Ag particles. As for the examination of optical band gaps and absorption of these films, UV-Vis-NIR photometer was used. The results show that, in as-deposited condition, the addition of Ag might disrupt the growth of crystalline structure and cause the formation of amorphous films. After annealing, it is found that the structure tends to become anatase phase which is a metastable phase between amorphous titanium oxide and rutile. More importantly, the absorption of the Ag-doped films would be enhanced in the visible-light range. Some of the enhancement is clearly due to plasmon resonance effect. The Ag-doped samples have shown some antibacterial effect in dark. When irradiated with light, the samples show a synergistic behavior combining the bactericidal effect of Ag ions and photocatalytic effect of TiO2.
UR - http://www.scopus.com/inward/record.url?scp=84863343691&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/339/1/012012
DO - 10.1088/1742-6596/339/1/012012
M3 - Conference article
AN - SCOPUS:84863343691
SN - 1742-6588
VL - 339
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 12012
T2 - 4th International Symposium on Functional Materials, ISFM2011
Y2 - 2 August 2011 through 6 August 2011
ER -