Stress gradient modification of the electroplated Ni-diamond nanocomposite for MEMS fabrication

Keyphrases

• Electroplated Ni 100%
• MEMS Fabrication 100%
• Ni-diamond 100%
• Stress Gradient 100%
• Gradient Modification 100%
• Current Density 50%
• Nanocomposite Film 33%
• Ni-based 33%
• Ni-based Films 33%
• Resonant Frequency 16%
• Grain Size 16%
• SEM Images 16%
• Uniformly Distributed 16%
• Low Stress 16%
• Resonator 16%
• Radius of Curvature 16%
• Process Scheme 16%
• Surface Profile 16%
• Micro-cantilever Beam 16%
• Warpage 16%
• MEMS Resonator 16%

Material Science

• Density 100%
• Film 100%
• Microelectromechanical System 100%
• Diamond 100%
• Nanocomposite 100%
• Resonator 66%
• Plating 66%
• Nanocomposite Film 66%
• Grain Size 33%
• Scanning Electron Microscopy 33%
• Surface (Surface Science) 33%