Standard 0.18um 1P6M CMOS IC foundry flow for accelerometer, analog readout circuit and wafer level capping package integration

C. J. Huang*, C. S. Chen, K. A. Wen, Y. T. Cheng, J. Y. Chen, C. S. Chang, W. C. Chou

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    4 引文 斯高帕斯(Scopus)

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    Engineering & Materials Science