Stacked Sidewall-Damascene Double-Layer Poly-Si Trigate FETs with RTA-Improved Crystallinity

Chiuan Huei Shen, Po Yi Kuo, Chun Chih Chung, Sen Yang Lee, Tien-Sheng Chao*

*此作品的通信作者

研究成果: Article同行評審

4 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds