Stability of High-k thin films in moisture ambience - The effect of dissolution gas from acryl apparatus

Sadahiro Akama*, Akira Kikuchi, Junichi Tonotani, Shun Ichiro Ohmi, Hiroshi Iwai

*此作品的通信作者

研究成果: Conference contribution同行評審

1 引文 斯高帕斯(Scopus)

摘要

High-k thin films were deposited on Si substrates by using MBD system equipped with electron beam evaporators. Then, the moisture absorption test was carried out for these samples. The effect of dissolution gas from the moisture absorption test apparatus was investigated by comparing the results with apparatus made of acryl and glass. The films in case of using acryl apparatus were dramatically degraded.

原文English
主出版物標題European Solid-State Device Research Conference
編輯Elena Gnani, Giorgio Baccarani, Massimo Rudan
發行者IEEE Computer Society
頁面587-590
頁數4
ISBN(電子)8890084782
DOIs
出版狀態Published - 2002
事件32nd European Solid-State Device Research Conference, ESSDERC 2002 - Firenze, Italy
持續時間: 24 九月 200226 九月 2002

出版系列

名字European Solid-State Device Research Conference
ISSN(列印)1930-8876

Conference

Conference32nd European Solid-State Device Research Conference, ESSDERC 2002
國家/地區Italy
城市Firenze
期間24/09/0226/09/02

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