Spin-on ZnO thin film transistors with oxidation treatment

Chen-Shuo Huang*, Yi Teh Chou, Po-Tsun Liu, Wan Fang Chung, Jui Chien Huang

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

The ZnO TFTs was fabricated by spin-on method and investigated by modulating deposition environments. It was discovered that the conductivity of ZnO TFTs can be obviously changed by modulating curing temperature and the performances can be improved by incorporating oxygen.

原文English
主出版物標題IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007
編輯CH Chen, YS Tsai
發行者SOCIETY INFORMATION DISPLAY TAIPEI CHAPTER
頁面557-559
頁數3
ISBN(列印)978-957-28522-4-8
出版狀態Published - 7月 2007
事件7th International Display Manufacturing Conference (IDMC 07) - Taipei, Taiwan
持續時間: 3 7月 20076 7月 2007

Conference

Conference7th International Display Manufacturing Conference (IDMC 07)
國家/地區Taiwan
城市Taipei
期間3/07/076/07/07

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