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Single-fabrication-step Ge nanosphere/SiO
2
/SiGe heterostructures: A key enabler for realizing Ge MOS devices
P. H. Liao, K. P. Peng,
Horng-Chih Lin
, T. George,
Pei-Wen Li
電子研究所
研究成果
:
Article
›
同行評審
17
引文 斯高帕斯(Scopus)
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2
/SiGe heterostructures: A key enabler for realizing Ge MOS devices」主題。共同形成了獨特的指紋。
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Keyphrases
Silica
100%
Nanospheres
100%
SiGe Heterostructures
100%
Ge MOS Devices
100%
Heterostructure
66%
Si1-xGex
66%
Strain Engineering
66%
Ge Content
66%
Compressive Strain
66%
Crystal Orientation
66%
SiGe Channel
66%
SiGe
33%
Single-crystalline
33%
Tunability
33%
Chemical Composition
33%
Channel Length
33%
MOS Devices
33%
Gate Stack
33%
Degree of Crystallinity
33%
Channel Engineering
33%
Oxygen Concentration
33%
Gate Oxide Thickness
33%
Ge-based
33%
Compositional Engineering
33%
Control Dynamics
33%
Dynamic Balance
33%
High Ge Content
33%
Chemical Strain
33%
Engineering
Heterostructures
100%
Nanosphere
100%
Silicon Dioxide
100%
Engineering Strain
66%
Compressive Strain
66%
Crystal Orientation
66%
Crystallinity
33%
Oxide Thickness
33%
Building Block
33%
Channel Length
33%
Gate Oxide
33%
Step Oxidation
33%
Dynamic Balance
33%
Material Science
Heterojunction
100%
Nanosphere
100%
Crystal Orientation
66%
Oxide Compound
33%
Oxidation Reaction
33%
Phase Composition
33%
Earth and Planetary Sciences
Stacking
100%
Crystallinity
100%