Single Chip of Electrostatic Discharge Detector for IC Manufacturing Field Control

I. Hsuan Wu, Ming Dou Ker

研究成果: Conference contribution同行評審

摘要

To detect and alarm the electrostatic discharge (ESD) events during the IC manufacturing environments, an antenna-driven ESD-event detector has been designed and fabricated in a single chip. The practically measured results have shown that the high-frequency transient peak-to-peak voltage (Vpp) during the ESD event has a significant correlation with its ESD-stress voltage level. The proposed ESD-event detector includes a logarithmic amplifier, a comparator, and a time discriminator. The output of the logarithmic amplifier demodulating Vpp is compared to a reference voltage with the comparator. The time discriminator can identify the ESD pulse by its duration time afterward. The single chip of the ESD-event detector has been implemented in a 0.18-μm CMOS process with a total silicon area of only 693×563 μm2 while dissipating 4.3 mW under a 1.8-V power supply. The proposed ESD-event detector can efficiently provide real-time ESD monitoring in the IC and semiconductor manufacturing factories.

原文English
主出版物標題2022 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2022 - Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9781665409216
DOIs
出版狀態Published - 2022
事件2022 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2022 - Hsinchu, Taiwan
持續時間: 18 4月 202221 4月 2022

出版系列

名字2022 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2022 - Proceedings

Conference

Conference2022 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2022
國家/地區Taiwan
城市Hsinchu
期間18/04/2221/04/22

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