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Simultaneous quality improvement of tunneling- and interpoly-oxides of nonvolatile memory devices by NH3 and N2O nitridation

研究成果: Conference contribution同行評審

1 引文 斯高帕斯(Scopus)

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深入研究「Simultaneous quality improvement of tunneling- and interpoly-oxides of nonvolatile memory devices by NH3 and N2O nitridation」主題。共同形成了獨特的指紋。
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Material Science