Simulations of electric field distributions by the susceptor-coupling effects for 2.45GHz microwave inside microwave chamber

Fu Kuo Hsueh, Chih Chen Chang, Kun Ping Huang, Yao Jen Lee, Wen Fa Wu, Tien-Sheng Chao

研究成果: Conference contribution同行評審

摘要

Microwave annealing were able for the applications of dopant activation[1,2] and silicidation[3] of the nano-scaled transistors, However, during conventional fixed-frequency microwave heating, standing wave patterns are formed in the microwave processing chamber resulting in nodes and antinodes over the processing area. This non-uniform energy distribution in turn results in non-uniform heating, commonly observed in the kitchen microwave oven. Coupling effects to improve the uniformity and dopant activation efficiency by fixed-frequency microwave annealing process was investigated[4]. Through the aid of susceptors, the uniformity of Rs and dopant activation efficiency could be improved.

原文English
主出版物標題Proceedings of the 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2015
發行者Institute of Electrical and Electronics Engineers Inc.
頁面385-388
頁數4
ISBN(電子)9781479999286, 9781479999286
DOIs
出版狀態Published - 25 8月 2015
事件22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2015 - Hsinchu, 台灣
持續時間: 29 6月 20152 7月 2015

出版系列

名字Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
2015-August

Conference

Conference22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2015
國家/地區台灣
城市Hsinchu
期間29/06/152/07/15

指紋

深入研究「Simulations of electric field distributions by the susceptor-coupling effects for 2.45GHz microwave inside microwave chamber」主題。共同形成了獨特的指紋。

引用此