Simulation and fabrication of silicon-oxynitride rib structure arrayed waveguide grating device

Wen Jen Liu*, Yin-Chieh Lai, Min Hang Weng, Chi Ming Cheng, Lee Peng-Hsiao

*此作品的通信作者

研究成果: Conference article同行評審

4 引文 斯高帕斯(Scopus)

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Mathematics

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds