Simulation and fabrication of amorphous silicon rib type arrayed waveguide grating

Wen Jen Liu*, Yen Hsin Cheng, Stven Chen, I. Tsen Lai, Yin-Chieh Lai, Min Hang Weng, Yung Hui Shih, Chung Da Lee

*此作品的通信作者

研究成果: Conference article同行評審

2 引文 斯高帕斯(Scopus)

摘要

The simulation and fabrication of amorphous silicon silicon on Insulator-arrayed waveguide gratings (SOI-AWG) device with 59% extra high refractive index difference (δ) were investigated. The transmission spectrum of AWG's device indicated the insertion loss, crosstalk and side-lobe which were lower than -3.5dB, -25 dB and -45 dB. Selecting index of 3.5012 a-Si and 1.4482 SiO2 as core and bottom cladding layers, with design parameters represented very low loss, crosstalk, and side-lobe transmission spectral by 2D and 3D simulations. Amorphous Si films optical measurements indicated, the refractive index and extinction coefficient of the a-Si films were variable during different argon/silane flow rate and operating vacuum pressure.

原文English
文章編號41
頁(從 - 到)285-296
頁數12
期刊Proceedings of SPIE - The International Society for Optical Engineering
5723
DOIs
出版狀態Published - 2005
事件Optical Components and Materials II - San Jose, CA, United States
持續時間: 24 1月 200525 1月 2005

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