Silane removal at ambient temperature by using alumina-supported metal oxide adsorbents

Jung Nan Hsu, Chuen-Tinn Tsai*, Cindy Chiang, Shou Nan Li


研究成果: Article同行評審

15 引文 斯高帕斯(Scopus)


Copper, zinc, and cerium oxide adsorbents supported on alumina were used to remove silane gas (SiH 4). The adsorbents were prepared using a coprecipitation method and characterized by the inductively coupled plasma mass spectrometry, X-ray powder diffractometer, and Brunauer-Emmett-Teller method (BET). The si-lane removal efficiency and adsorption capacity of the adsorbents were investigated in this study. Test results showed that the adsorbents containing active species had a removal efficiency >99.9% for SiH4 before breakthrough. Adsorbents containing mixed oxides (CuO-CeO2/ Al2O3 and CuO-ZnO/Al2O3), which showed well-dispersed active species and high BET surface areas, had a greater adsorption capacity than the adsorbents containing single metal oxide. However, when the CuO-ZnO/ Al2O3 adsorbents contain >40 wt% of active metal oxides, the increase of active species lowered the BET surface area leading to a decrease of the adsorption capacity. Additionally, when the content of the active metal oxides was between 20% and 40%, the CuO-ZnO/Al2O3 adsorbents demonstrated higher adsorption capacity.

頁(從 - 到)204-210
期刊Journal of the Air and Waste Management Association
出版狀態Published - 1 1月 2007


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