Significant improvement of GaN crystal quality with ex-situ sputtered AlN nucleation layers

Shuo Wei Chen, Young Yang, Wei Chih Wen, Heng Li, Tien-chang Lu*

*此作品的通信作者

研究成果: Conference contribution同行評審

7 引文 斯高帕斯(Scopus)

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Keyphrases

Engineering

Material Science