@inproceedings{70f5858b412549aaaf12b05403bd3c1f,
title = "Si Nanopillar/SiGe Composite Structure for Thermally Managed Nano-devices",
abstract = "We have demonstrated a thermally managed Si nanopillar/SiGe composite structure. Our fabricated defect-free Si nanopillar channel structure showed a 1/100 times lower thermal conductivity than Si bulk thanks to the control of the phonon transports. The results of thermal conductivity measurements clarified that the nanopillar structure could eliminate electron-phonon scattering. As such, this structure represents a promising solution for advanced CMOS technologies.",
author = "Daisuke Ohori and Masayuki Murata and Atsushi Yamamoto and Kazuhiko Endo and Chuang, {Min Hui} and Lee, {Ming Yi} and Yi-Ming Li and Jenn-Hwan Tarng and Lee, {Yao Jen} and Seiji Samukawa",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 21st IEEE International Conference on Nanotechnology, NANO 2021 ; Conference date: 28-07-2021 Through 30-07-2021",
year = "2021",
month = jul,
day = "28",
doi = "10.1109/NANO51122.2021.9514289",
language = "English",
series = "Proceedings of the IEEE Conference on Nanotechnology",
publisher = "IEEE Computer Society",
pages = "199--202",
booktitle = "NANO 2021 - 21st IEEE International Conference on Nanotechnology, Proceedings",
address = "United States",
}