Short-Channel Poly-Si Thin-Film Transistors with Ultrathin Channel and Self-Aligned Tungsten-Clad Source/Drain

Hsiao-Wen Zan*, Ting Chang Chang, Po Sheng Shih, Du Zen Peng, Po Yi Kuo, Tiao Yuan Huang, Chun Yen Chang, Po-Tsun Liu

*此作品的通信作者

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds