Sensing and structural properties of Ti-doped tin oxide (SnO2) membrane for bio-sensor applications

A. Panimaya Selvi Isabel; Chyuan Haur Kao; Rama Krushna Mahanty; Yew-Chuhg Wu; Chung Yi Li; Chan Yu Lin; Chun Fu Lin

doi:10.1016/j.ceramint.2017.05.073

Sensing and structural properties of Ti-doped tin oxide (SnO₂) membrane for bio-sensor applications

A. Panimaya Selvi Isabel, Chyuan Haur Kao^*, Rama Krushna Mahanty, Yew-Chuhg Wu, Chung Yi Li, Chan Yu Lin, Chun Fu Lin

^*此作品的通信作者

材料科學與工程學系

研究成果: Article › 同行評審

24 引文斯高帕斯（Scopus）

摘要

We investigated the effect of rapid thermal annealing (RTA) on the sensing and structural characteristics of Ti-doped SnO₂ based electrolyte-insulator-semiconductor (EIS) pH sensors. The Ti-doped Tin oxide (SnO₂) EIS sensor annealed at 700 °C post deposition annealing, exhibits the best sensing characteristics in terms of sensitivity, linearity, hysteresis and drift rate. This derives from Ti incorporation that improves the thin-film stoichiometry by reducing dangling bonds on the dielectric surface and improves the temperature stability. We further studied the structural, compositional, and morphological characteristics of the deposited thin-film. RTA treatment increases the sensitivity and linearity by creating larger grain size and higher number of surface sites. Sodium (Na⁺) and potassium (K⁺) sensing performance was also measured using the fabricated EIS sensors.

原文	English
頁（從 - 到）	10386-10391
頁數	6
期刊	Ceramics International
卷	43
發行號	13
DOIs	https://doi.org/10.1016/j.ceramint.2017.05.073
出版狀態	Published - 2017

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title = "Sensing and structural properties of Ti-doped tin oxide (SnO2) membrane for bio-sensor applications",

abstract = "We investigated the effect of rapid thermal annealing (RTA) on the sensing and structural characteristics of Ti-doped SnO2 based electrolyte-insulator-semiconductor (EIS) pH sensors. The Ti-doped Tin oxide (SnO2) EIS sensor annealed at 700 °C post deposition annealing, exhibits the best sensing characteristics in terms of sensitivity, linearity, hysteresis and drift rate. This derives from Ti incorporation that improves the thin-film stoichiometry by reducing dangling bonds on the dielectric surface and improves the temperature stability. We further studied the structural, compositional, and morphological characteristics of the deposited thin-film. RTA treatment increases the sensitivity and linearity by creating larger grain size and higher number of surface sites. Sodium (Na+) and potassium (K+) sensing performance was also measured using the fabricated EIS sensors.",

keywords = "Sensing membrane, SnO, Ti-doped",

author = "{Selvi Isabel}, {A. Panimaya} and Kao, {Chyuan Haur} and Mahanty, {Rama Krushna} and Yew-Chuhg Wu and Li, {Chung Yi} and Lin, {Chan Yu} and Lin, {Chun Fu}",

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year = "2017",

doi = "10.1016/j.ceramint.2017.05.073",

language = "English",

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TY - JOUR

T1 - Sensing and structural properties of Ti-doped tin oxide (SnO2) membrane for bio-sensor applications

AU - Selvi Isabel, A. Panimaya

AU - Kao, Chyuan Haur

AU - Mahanty, Rama Krushna

AU - Wu, Yew-Chuhg

AU - Li, Chung Yi

AU - Lin, Chan Yu

AU - Lin, Chun Fu

PY - 2017

Y1 - 2017

N2 - We investigated the effect of rapid thermal annealing (RTA) on the sensing and structural characteristics of Ti-doped SnO2 based electrolyte-insulator-semiconductor (EIS) pH sensors. The Ti-doped Tin oxide (SnO2) EIS sensor annealed at 700 °C post deposition annealing, exhibits the best sensing characteristics in terms of sensitivity, linearity, hysteresis and drift rate. This derives from Ti incorporation that improves the thin-film stoichiometry by reducing dangling bonds on the dielectric surface and improves the temperature stability. We further studied the structural, compositional, and morphological characteristics of the deposited thin-film. RTA treatment increases the sensitivity and linearity by creating larger grain size and higher number of surface sites. Sodium (Na+) and potassium (K+) sensing performance was also measured using the fabricated EIS sensors.

AB - We investigated the effect of rapid thermal annealing (RTA) on the sensing and structural characteristics of Ti-doped SnO2 based electrolyte-insulator-semiconductor (EIS) pH sensors. The Ti-doped Tin oxide (SnO2) EIS sensor annealed at 700 °C post deposition annealing, exhibits the best sensing characteristics in terms of sensitivity, linearity, hysteresis and drift rate. This derives from Ti incorporation that improves the thin-film stoichiometry by reducing dangling bonds on the dielectric surface and improves the temperature stability. We further studied the structural, compositional, and morphological characteristics of the deposited thin-film. RTA treatment increases the sensitivity and linearity by creating larger grain size and higher number of surface sites. Sodium (Na+) and potassium (K+) sensing performance was also measured using the fabricated EIS sensors.

KW - Sensing membrane

KW - SnO

KW - Ti-doped

UR - http://www.scopus.com/inward/record.url?scp=85018878387&partnerID=8YFLogxK

U2 - 10.1016/j.ceramint.2017.05.073

DO - 10.1016/j.ceramint.2017.05.073

M3 - Article

AN - SCOPUS:85018878387

SN - 0272-8842

VL - 43

SP - 10386

EP - 10391

JO - Ceramics International

JF - Ceramics International

IS - 13

ER -

Sensing and structural properties of Ti-doped tin oxide (SnO2) membrane for bio-sensor applications

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Sensing and structural properties of Ti-doped tin oxide (SnO₂) membrane for bio-sensor applications