Self-Limited Low-Temperature Trimming and Fully Silicided S/D for Vertically Stacked Cantilever Gate-All-Around Poly-Si Junctionless Nanosheet Transistors

Chris Chun Chih Chung, Chun Ming Ko, Tien Sheng Chao*

*此作品的通信作者

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Medicine & Life Sciences

Chemical Compounds