Self-assembled two-dimensional surface structures for beam shaping of GaN-based vertical-injection light-emitting diodes

Enhanced light extraction and beam shaping of GaN-based vertical-injection light-emitting diodes (VI-LEDs) employing biomimetic surface structures were demonstrated. The biomimetic surface structures were fabricated using self-assembled polystyrene nanospheres serving as a monolayer mask, and followed by anisotropic inductively coupled plasma reactive ion etching. The light output power of the VI-LEDs with the patterned structures exhibited an efficiency enhancement factor of 68% at a driving current of 350 mA, compared to those without any surface structures. The structures also resulted in a modified heart-shaped radiation pattern, which is preferable for backlight applications in flat panel displays.