TY - GEN
T1 - Selective functionalization on ultra-thin body FETs
AU - Liu, H. H.
AU - Lin, Y. S.
AU - Chen, C. C.
AU - Sheu, Jeng-Tzong
PY - 2011/2/20
Y1 - 2011/2/20
N2 - A new method of selective functionalization of ultra-thin body field-effect transistors (UTBFETs) is reported for biosensor applications. A polymer film, Polymethylmethacrylate (PMMA), is used as blocking layer and is ablated electrically at the specific region on UTBFETs by localized joule heating. The exposed site was then functionalized with a chemical linker molecule, N-(2-Aminoethyl)- 3-aminopropyl-trimethoxysilane (AEAPTMS), while the surrounding area is still protected by the chemically inert polymer layer. As demonstration, both gold nanoparticles (AuNPs) and fluorescein isothiocyanate (FITC) molecules are selectively bound onto the linker molecules subsequently on the surface of exposed binding sites of UTBFETs.
AB - A new method of selective functionalization of ultra-thin body field-effect transistors (UTBFETs) is reported for biosensor applications. A polymer film, Polymethylmethacrylate (PMMA), is used as blocking layer and is ablated electrically at the specific region on UTBFETs by localized joule heating. The exposed site was then functionalized with a chemical linker molecule, N-(2-Aminoethyl)- 3-aminopropyl-trimethoxysilane (AEAPTMS), while the surrounding area is still protected by the chemically inert polymer layer. As demonstration, both gold nanoparticles (AuNPs) and fluorescein isothiocyanate (FITC) molecules are selectively bound onto the linker molecules subsequently on the surface of exposed binding sites of UTBFETs.
UR - http://www.scopus.com/inward/record.url?scp=80053315973&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2011.6017524
DO - 10.1109/NEMS.2011.6017524
M3 - Conference contribution
AN - SCOPUS:80053315973
SN - 9781612847757
T3 - NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
SP - 1000
EP - 1003
BT - NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
T2 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
Y2 - 20 February 2011 through 23 February 2011
ER -